Other Metrology Equipment Services

Comprehensive Support for Metrology & Inspection Equipment

We deliver expert service and parts support for a wide range of metrology and inspection platforms — extending beyond our core overlay systems.

Our end-to-end support solutions cover everything from diagnostics and preventive maintenance to troubleshooting and corrective maintenance, ensuring your capital equipment operates at peak performance. With deep technical expertise, we are fully equipped to handle complex systems with precision and reliability.

Supported Equipment Platforms Include:

Thin Film Metrology
Critical Dimension (CD) Measurement
Wafer Inspection & Handling

Some of OEM Platforms Supported:

KLA-Tencor: Bright Field, Dark Field, SP1, SP2
Brooks: Wafer Handlers, Turbo Stockers, Guardian Reticle Stockers

AMHS Systems: Erotrack (Brooks-PRI)

Phoenix: Robotic Wafer Handlers
Versa Ports & SMIF Loaders
Stockers & Sorters
Fortrend Systems