Upgrades & Refurbishments for KLA-Tencor Overlay Systems

Maximize the performance and lifespan of your legacy KLA-Tencor overlay systems with our professional upgrades and refurbishments solutions. Whether you need enhanced reliability, improved measurement accuracy and performance, or reduced downtime, we provide cost-effective solutions tailored to your specific operational needs.

Our System Upgrades / Retrofit Capabilities

Whether you’re scaling operations or modernizing legacy tools, we ensure seamless integration with your fab’s workflow environment.

We specialize in transitioning legacy platforms to advanced models:

KLA 5300 → Archer 5 / Archer 10 / XT / AIM / AIM+ / A100 / A200

System upgrade options are aim to deliver:

🔧 Improved overlay performances as the newer model.

🔧 Reduced maintenance overhead

🔧 Extended system lifecycle with minimal disruption

Our Refurbishment Capabilities

We specialize in full refurbishments system, available onsite and in-house facility.

Support Platforms of KLA Series: 5300 / Archer 10 / Archer XT / Archer AIM / Archer AIM+ / Archer 200.

🔧 Precision reconditioning of key modules

🔧 Replacement and repair of worn or obsolete components

🔧 Optical system realignment to OEM Spec

🔧 Mechanical calibration and reliability

🔧 Improved system stability and performance tuning to OEM spec.

Quality Assurance